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The MAIA3 model 2016 is an ultra-high resolution SEM for ultimate surface sensitivity and contrast with outstanding imaging
capabilities that excel in the whole range of accelerating voltages.

However, it is the excellent performance at low beam energies what truly makes MAIA3 the ideal electron microscope for imag
ing beam-sensitive common in today’s semiconductor devices.

MAIA3 delivers outstanding surface sensitivity and high spatial resolution for the challenging characterisation of nanomaterials.

The new MAIA3 is the microscope of choice for the study of non conductive samples including uncoated biological specimens.

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